PROCESS FOR PRODUCTION OF SUBSTRATES FROM MONOCRYSTALS OF SAPPHIRE ( -Al2O3)

摘要

A process for production of substrates from monocrystals of sapphire (-l) relates to semiconductor technology and can be used in industrial production of silicon-on-sapphire structures and ultra bright light-emitting diodes on the basis of epitaxial layers of nitride compounds in the production of dielectric supports from monocrystals of sapphire (-l).