首页> 外国专利> LOW-PRESSURE CHAMBER FOR SCANNING ELECTRON MICROSCOPY IN A WET ENVIRONMENT

LOW-PRESSURE CHAMBER FOR SCANNING ELECTRON MICROSCOPY IN A WET ENVIRONMENT

机译:湿环境中扫描电子显微镜的低压腔

摘要

A specimen enclosure assembly (100) for use in an electron microscope and including a rigid specimen enclosure dish (102) having an aperture (122) and defining an enclosed specimen placement volume (125), an electron beam permeable, fluid impermeable, cover (114) sealing the specimen placement volume (125) at the aperture (122) from a volume outside the enclosure and a pressure controller communicating with the enclosed specimen placement volume (125) and being operative to maintain the enclosed specimen placement volume (125) at a pressure, which exceeds a vapor pressure of a liquid sample (123) in the specimen placement volume (125) and is greater than a pressure of a volume outside the enclosure, whereby a pressure differential across the cover (114) does not exceed a threshold level at which rupture of the cover (114)would occur.
机译:一种用于电子显微镜的标本外壳组件(100),包括具有孔(122)并限定一个标本放置空间(125)的刚性标本外壳盘(102),可透过电子束,不透液的盖( 114)将孔(122)处的标本放置空间(125)与外壳外部的空间密封,并且压力控制器与封闭的标本放置空间(125)连通并且可操作以将封闭的标本放置空间(125)保持在超过样本放置空间(125)中液体样本(123)的蒸气压且大于外壳外部空间的压力的压力,从而跨盖(114)的压差不超过盖(114)将发生破裂的阈值水平。

著录项

  • 公开/公告号EP1509941A4

    专利类型

  • 公开/公告日2007-12-12

    原文格式PDF

  • 申请/专利权人 YEDA RESEARCH AND DEVELOPMENT CO. LTD.;

    申请/专利号EP20030725573

  • 发明设计人 THIBERGE STEPHAN;MOSES ELISHA;

    申请日2003-06-01

  • 分类号G01N23/225;H01J37/00;G01N23/00;G02Bnull/null;G21K7/00;H01J37/20;H01J37/252;H01J37/26;H01J37/28;

  • 国家 EP

  • 入库时间 2022-08-21 20:00:52

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