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METHOD FOR PRODUCING COMPLEMENTARY VERTICAL BIPOLAR TRANSISTORS FOR INTEGRATED CIRCUITS

机译:用于制造集成电路的互补垂直双极晶体管的方法

摘要

The invention relates to microelectronics, in particular to producing integrated circuits (IC) using complementary bipolar transistors NPN and PNP provided with carriers of different conductivity types. The processing speed of integrated circuits is obtainable by using complementary transistors, the minimum size of the emitter areas of which, determining processing speed, is less than the minimum size in a lithography, due to the fact that the actual size of the emitter areas of both types of transistors is determined by the size of etching of an oxide silicon thin layer under the electrode of an emitter at an indefinitely small calculated value of submicron or ultra submicron size, which is subsequently fillable with polycrystal silicon.
机译:本发明涉及微电子学,特别是涉及使用互补双极晶体管NPN和PNP生产集成电路,该互补双极晶体管NPN和PNP具有不同导电类型的载流子。集成电路的处理速度可通过使用互补晶体管来获得,互补晶体管的发射极区域的最小尺寸决定了处理速度,小于互补极光刻中的最小尺寸,这是由于以下事实:两种类型的晶体管都由在发射极的电极下方的氧化物硅薄层的蚀刻尺寸确定,该尺寸不确定地小于亚微米或超亚微米尺寸,随后可以用多晶硅填充。

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