METHOD AND DEVICE FOR ELECTRONIC CYCLOTRONIC RESONANCE PLASMA DEPOSIT OF CARBON NANOFIBRE LAYERS IN FABRIC FORM AND RESULTING FABRIC LAYERS

摘要

The invention concerns a method and a device for electronic cyclotronic resonance plasma deposit of carbon nanofibres or nanotubes in fabric form, on a catalyst-free substrate, by microwave power injection into a deposit chamber comprising a magnetic structure with a highly unbalanced magnetic mirror, and at least an electronic cyclotronic resonance inside said deposit chamber itself and opposite said substrate, whereby, under pressure less than 10-4 mbar, the carbon-containing gas in said magnetic mirror at the centre of the deposit chamber is ionised and/or dissociated, thereby producing species which will be deposited on said substrate which is heated. The invention further concerns a layer, optionally on a substrate, formed of a fabric or array of carbon nanofibres or nanotubes interconnected as in a web, said layer being catalyst-free and having multiple layers-or a multilayer structure - comprising at least two layers of carbon nanofibres or nanotubes in fabric form, and filters, nanogrids accelerating or decelerating electrons and flat displays comprising such layers or structures.