首页> 外国专利> A HYBRID BULK-SOI 6T-SRAM CELL FOR IMPROVED CELL STABILITY AND PERFORMANCE

A HYBRID BULK-SOI 6T-SRAM CELL FOR IMPROVED CELL STABILITY AND PERFORMANCE

机译:混合BULK-SOI 6T-SRAM电池,可提高电池的稳定性和性能

摘要

The present invention provides a 6T-SRAM semiconductintg structure including a substrate having an SOI region and a bulk-Si region, wherein the SOI region and the bulk-Si region have a same or differing crystallographic orientation; an isolation region separating the SOI region from the bulk Si-region; and at least one first device located in the SOI region and at least one second device located in the bulk-Si region. The SOI region has a silicon layer atop an insulating layer. The bulk-Si region further comprises a well region underlying the second device and a contact to the well region, wherein the contact stabilizes floating body effects. The well contact is also used to control the threshold voltages of the FETs in the bulk-Si region to optimized the power and performance of the SRAM cell built from the combination of the SOI and bulk-Si region FETs.
机译:本发明提供了一种6T-SRAM半导体结构,该结构包括具有SOI区域和体Si区域的衬底,其中所述SOI区域和体Si区域具有相同或不同的晶体学取向;隔离区,将SOI区与体Si区分开;至少一个位于SOI区域的第一器件和至少一个位于体硅区域的第二器件。 SOI区域在绝缘层顶上具有硅层。体硅区域还包括在第二器件下方的阱区域以及与该阱区域的接触,其中该接触稳定了浮体效应。阱接触还用于控制体硅区中FET的阈值电压,以优化通过SOI和体硅区FET的组合构建的SRAM单元的功率和性能。

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