COATING APPARATUS AND METHOD FOR IMPROVEMENT OF LUMINESCENT PROPERTIES AND LIFETIME OF PHOSPHOR POWDER AND COATED PHOSPHOR POWDER BY THE SAME

摘要

A coating apparatus and method for phosphor powder and the coated phosphor powder are provided to reduce structure defects of a surface of phosphor by coating the phosphor with an oxide film. A coating reaction of phosphor is performed in a reactor(50), and precursor to be oxidized is supplied into the reactor by a precursor supplying member, and oxidant is supplied into the reactor by an oxidant supplying member. A purge gas is supplied into the reactor by a purge gas supplying member. The reactor is connected to a vacuuming member. A controller(88) purges the reactor by using the purge gas supplying member and the vacuuming member.