Hybrid Machining Center using Focused Ion Beam and Its Processing Technology

摘要

The present invention relates to a processing method and the hybrid processing apparatus of this focused ion beam, and an object thereof is There lathe machining method of the machining system in combination with a vertical machining center of the focused ion beam to the hybrid so that it can be applied to various fields to provide a processing apparatus and a processing method using it. In the present invention, a stage for moving the fixed object, with the object to provide a space which is placed in a fixed small displacement, FIB processing apparatus equipped with the ion beam irradiation section for irradiating the ion beam to the object for this purpose, the top of the stage stage and is disposed on both sides and additionally secure the object, the object is fixed to rotate the object so as to have a horizontal axis of rotation in a vertical lower end portion of the ion beam irradiation part, focused ion beam having a pair of fixing portions having a rotational symmetrical structure and the hybrid processing apparatus and method using the same process as that relating to the technical subject matter.