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A novel oxidation structure/method to fabricate a high-performance magnetic tunneling junction MRAM
A novel oxidation structure/method to fabricate a high-performance magnetic tunneling junction MRAM
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机译:一种新颖的氧化结构/方法,以制造高性能的磁性隧道结MRAM
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摘要
An MTJ (magnetic tunneling junction) MRAM (magnetic random access memory) has a tunneling barrier layer of substantially uniform and homogeneous AlSUB2/SUBOSUB3 /SUBstoichiometry. The barrier layer is formed by depositing Al on a CoFe layer or a CoFe-NiFe bilayer having an oxygen surfactant layer formed thereon, then oxidizing the Al by radical oxidation. The underlying surfactant layer contributes oxygen to the bottom surface of the Al, forming an initial amorphous AlSUB2/SUBOSUB3 /SUBlayer. This layer produces small, uniform grains in the remaining Al layer, which promotes a uniform oxidation of the Al between its upper and lower surfaces by the subsequent radical oxidation. A final annealing process to set a pinned layer magnetization enhances the homogeneous oxidation of the layer.
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机译:MTJ(磁隧道结)MRAM(磁随机存取存储器)具有基本均匀且均质的Al 2 SUB> O 3 SUB>化学计量的隧道势垒层。阻挡层的形成方法是,在形成有氧表面活性剂层的CoFe层或CoFe-NiFe双层上沉积Al,然后通过自由基氧化使Al氧化。下层的表面活性剂层将氧贡献到Al的底表面,形成初始的非晶Al 2 SUB> O 3 SUB>层。该层在剩余的Al层中产生小的均匀晶粒,这通过随后的自由基氧化促进Al上下表面之间的均匀氧化。设置固定层磁化强度的最终退火工艺可增强层的均匀氧化。
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