APPARATUS FOR X-RAY ANALYSIS AND METHOD OF X-RAY INTENSITY CALIBRATION USING THE SAME

摘要

It is arranged to carry out a calibration for X-ray analysis and using an a kind of identical device of the method for X-ray intensity calibration, is used to maintain the intensity of the X-ray of a scheduled intensity, a standard sample will not be loaded and unloaded on a stage. A device for X-ray analysis includes a compartment, an X-ray generating unit, a stage (140) and a detection part. Room provides the density of the space to the measure thickness of a film and the impurity on a substrate purposes X-ray. X-ray generating unit is arranged on a top of room and provides X-ray indoors to substrate. Stage supports substrate, including a standard sample (144), is used to calibrate the sensibility of X-ray. Detection part is placed on the side of room to detect the intensity from the X-ray of substrate reflection.