SIMULATION APPARATUS AND SIMULATION METHOD USED TO DESIGN CHARACTERISTICS AND CIRCUITS OF SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE FABRICATION METHOD

摘要

A simulation apparatus and a simulation method used to design the characteristics and circuits of a semiconductor device, and a semiconductor device fabrication method are provided to optimize the characteristics of a transistor formed on a polycrystal silicon layer of an insulating substrate and a circuit including the transistor. A simulation apparatus used to design the characteristics and circuits of a semiconductor device includes an input device(11), a storage device(12), an operating device(16), a control device(15), and an output device(17). The input device inputs the device model formula of a transistor and the initial value of a device parameter. The storage device stores the device model formula, the initial value of the device parameter, and the voltage-current characteristic desired by the transistor. The operating device operates based on the initial value of the device parameter, calculates a first electric potential of a source area terminal adjacent to a gate electrode terminal, a second electric potential of the source area terminal, a third electric potential of a drain area terminal adjacent to the gate electrode terminal, and a fourth electric potential, and calculates drain current by substituting the first electric potential, the second electric potential, the third electric potential, and the fourth electric potential to the device model formula. The control device controls the input device, the storage device, and the operating device, compares the voltage-current characteristic desired by the transistor with the voltage-current characteristic based on the drain current, and controls to obtain a model parameter by changing the device parameter until the comparison result is smaller than an allowable error. The output device outputs the model parameter which is obtained by the operation of the operating device under the control of the control device.