ELECTROCHEMICAL GAS SENSOR CHIP AND METHOD FOR PREPARING THE SAME

摘要

An electrochemical gas sensor chip adapted to a portable terminal and a method for preparing the sensor chip to make a compact sensor without using a liquid such as liquid electrolyte are provided. An electrochemical gas sensor chip(100) includes a substrate(101), an electrode, a solid electrolyte layer(106), and a hydrophobic micro-porous membrane(107). The electrode is patterned on the substrate. The solid electrolyte layer having proton conductivity is formed on the substrate with the patterned electrode. The hydrophobic micro-porous membrane is formed on the solid electrolyte layer. The substrate is formed of one selected from a group consisting of silicon, polycarbonate, quartz, GaAs, InP, and glass. In the patterned electrode, a working electrode(103), a counter electrode(104), and a reference electrode(105) are formed on the same surface of the substrate.