Electrochemical Gas Sensor Chip and Method for Preparing the Same

摘要

The invention relates to an electrochemical gas sensor chip and a manufacturing method thereof,The electrochemical gas sensor chip according to the invention is a substrate,The patterned electrode on the upper recording plate,A solid electrolytic membrane with proton conductivity formed on a substrate including the patterned electrode,The solid electrolyte membrane comprises a few porous membranes,According to the invention, the gas sensor with chip structure is easy to drive circuit and integrate,Because solid electrolyte membrane is used, it can be miniaturized,Because of the use of semiconductor engineering, a large area of engineering can be realized.