ORDERED MICRO/NANO SIZED PATTERNS OF POLYMER FILMS WITH MICROIMPRINTING AND CONTROLLED DEWETTING

摘要

A micro/nano imprinting method of a polymer film using micro imprinting and dewetting is provided to manufacture a nano-sized pattern using a homopolymer through pattern reduction of a pattern size. Micro imprinting using a micro mold is performed on a surface of a polymer film formed on a substrate to change a thickness of the polymer film in a constant pattern. The polymer film is heated at a temperature above glass transition temperature of a polymer so that dewetting selectively occurs at the portion thinned by the micro imprinting. The polymer film is formed by spin coating, and the polymer film is heated by a temperature of 100 to 200 when the micro imprinting is performed.