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WAFER-LEVEL ACF FLIP CHIP PACKAGE USING DOUBLE-LAYERED ACF/NCF

机译:使用双层ACF / NCF的晶圆级ACF翻转芯片包装

摘要

A method for fabricating a wafer-level flip chip package is provided to suppress shadow effects by using ACA(Anisotropic Conductive Adhesives) for easily adjusting coating thickness and NCA(Non-Conductive Adhesives), for achieving high selectivity in electrical connections while stabilizing a bonding process. A method for fabricating a wafer-level flip chip package comprises the steps of: forming a non-conductive layer(115) by coating and drying non-conductive mixture solution containing insulating polymer resin, hardener, and organic solvent onto a wafer(100) on which a non-solder bump(113) is formed; forming an anisotropic conductive layer(116) by coating and drying conductive mixture solution containing insulating polymer resin, hardener, organic solvent, and conductive materials onto the non-conductive layer; dicing the wafer coated with the non-conductive layer and anisotropic conductive layer to form individual semiconductor chips(200); and subjecting the individual semiconductor chip to a flip-chip bonding in alignment with an electrode of a substrate.
机译:提供了一种用于制造晶片级倒装芯片封装的方法,以通过使用易于调节涂层厚度的ACA(各向异性导电胶)和NCA(非导电胶)来抑制阴影效应,从而实现电连接中的高选择性同时稳定键合处理。一种制造晶片级倒装芯片封装的方法,包括以下步骤:通过将包含绝缘聚合物树脂,硬化剂和有机溶剂的非导电混合物溶液涂覆并干燥到晶片(100)上来形成非导电层(115)。在其上形成非焊料凸块(113);通过将包含绝缘聚合物树脂,硬化剂,有机溶剂和导电材料的导电混合物溶液涂覆并干燥到非导电层上来形成各向异性导电层(116);切割涂覆有非导电层和各向异性导电层的晶片以形成单独的半导体芯片(200);使所述单个半导体芯片与基板的电极对准地进行倒装芯片接合。

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