Touch cleaning apparatus for large area substrate

摘要

relates to a contact-type cleaning apparatus of the present invention is the large area substrate , and a transfer part for transferring the substrate , the upper part is in contact with the brush belt surface to the top surface of the transfer substrate which is to clean the top surface of the substrate , the transfer surface which is in contact with the bottom surface of the substrate includes a lower belt brush to clean the bottom surface of the substrate . The present invention configured as described above is effective to increase the cleaning power by the contact surface in a relatively small area of the belt by applying a brush type , the substrate and the brush has a contact pressure surface contact with the substrate as the substrate is damaged is distributed there is an effect that can be prevented .