REPAIR METHOD OF COLOR FILTER TOKKI AND COLOR FILTER TOKKI REPAIR APPARATUS

摘要

An apparatus for eliminating a projection of a color filter and a method thereof are provided to map a shape of the projection to a pattern of a contour line by thicknesses and process it in order to improve processing precision. An apparatus for eliminating a projection of a color filter includes a three dimension measuring unit(180), a laser supply unit(100), a scan driver(130), a focus optical system(140), a processing surface size controller(150), a beam transfer optical system(160), and an objective lens(200). The three dimension measuring unit measures a projection of a processed object disposed on a stage having a two dimensional image surface being a processing surface in a three-dimensional way. The laser supply unit supplies laser to eliminate the projection of the processed object. The scan driver controls an irradiation position of the laser to X and Y directions. The focus optical system focuses the laser beam output from the scan driver on one dimensional image surface. The processing surface size controller controls a size of the one dimensional image surface to control the size of the processing surface. The beam transfer optical system outputs the laser beam while maintaining an irradiation range of the laser beam small or identically. The objective lens adjusts an interval with the stage to precisely focus the laser beam on the processing surface.