ELECTRODE STRUCTURE FOR MICRO-MECHANICAL GYROSCOPE AND MICRO-MECHANICAL GYROSCOPE ON BASE OF THAT STRUCTURE

摘要

FIELD: measuring technique.;SUBSTANCE: electrode structure fro micro-mechanical gyroscope has movable electrode, formed by symmetrical disposed identical sectors or by parts of sectors. Part of sectors has teeth at side located on radial direction. Electrode structure also has group of motionless electrodes, having shape of sectors or parts of sectors, made in such a way that it has electrodes, which have part of their area disposed above teeth of movable electrode. Group of motionless electrodes has electrodes belonging to four quadrants and disposed outside teeth areas of movable electrode. Micro-mechanical gyroscope on base of described electrode structure has support onto base. Conducting movable weight, which has to be movable electrode, is suspended onto support by means of resonant suspension. Motionless electrodes are applied onto cap of micro-mechanical gyroscope; cap is attached to base. Ridge-shaped motor of micro-mechanical gyroscope is formed by teeth of stators mounted onto base and by teeth of movable weight. Expensive costs on rotation band are not required.;EFFECT: improved precision of micro-mechanical gyroscope; reduced cost.;4 cl, 7 dwg