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Carbon - a hard mask with a nitrogen - doped carbon layer as adhesion swellable layer for adhesion to metal or metal containing inorganic materials and processes for their preparation
Carbon - a hard mask with a nitrogen - doped carbon layer as adhesion swellable layer for adhesion to metal or metal containing inorganic materials and processes for their preparation
Carbon - a hard mask with a carbon layer and an adhesive layer for adhesion to metal or metal containing inorganic materials; wherein the adhesive layer is a nitrogen - doped carbon layer on the metal or the metal containing inorganic material is.
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