Measuring cell device for pressure sensor, has membrane and strength measuring element, impinged with pressure for measuring fluid, where measuring element is connected with side facing away from pressure of membrane

摘要

The cell device has a membrane (18) and a strength measuring element (14), impinged with pressure for measuring a fluid. The measuring element is connected with a side facing away from pressure (22) of the membrane. The side bends during the membrane deflection. The strength measuring element has a glass substrate (15) and a resistance element (32), which is applied on the substrate and changes the resistance with the deflection of the substrate. A glass film (24) has a melting point below the melting point of the substrate and the membrane. Independent claims are also included for the following: (1) a pressure sensor with a measuring cell device (2) a method for producing a measuring cell device.