Measuring cell for high-pressure sensor for measuring pressures above about hundred bar utilized in different types of markets such as automobile market, has metal body, where deflection measuring element detects deflection of membrane area

摘要

The measuring cell (52) has a metal body (64), at which a membrane area (72) is formed, where a deflection measuring element (56) is provided for detecting a deflection of the membrane area on the metal body. An integrated circuit (62) is formed for signal processing of signals of the deflection measuring element. The metal body is formed as monolithic block made from steel with a blind opening (70), where the base of the blind opening is formed as membrane area. A peripheral wall (78) surrounding the blind hole forms a supporting- and holding area (74) for the membrane area. Independent claims are included for the following: (1) a high-pressure sensor with a pressure connection; and (2) a method for manufacturing a measuring cell.