Indentor i.e. nanoindentor, for measuring material mechanical characteristics, has comb drive actuator with comb electrodes having fingers aligned parallel to each other, so that fingers partially overlap based on applied electrical voltage

摘要

The indentor has a penetrator (2) with predetermined geometry, a device for measuring of a penetration depth and a device for force production, with which the penetrator penetrates into a penetrator tip (4) that is to be measured. The two devices are formed by a lateral comb drive actuator (6), which has two comb electrodes. The electrodes have multiple comb fingers (7, 8, 9) that are aligned parallel to each other in such a manner that the fingers partially overlap depending on applied electrical voltage. An independent claim is also included for a method of measuring of mechanical characteristics of materials.