Micromechanical component used in e.g. acceleration sensor, has a stator electrode finger or an actuator electrode finger which partially overlaps a separating trench formed partially surrounding the outer side of a movable mass

摘要

The micromechanical component has a substrate (10) having a stator electrode, and a spring (12) connected to movable mass (14) having actuator electrode. The movable mass and spring are arranged at functional side (16) of substrate. A separating trench (18) is formed partially surrounding the outer side (20) of movable mass. The stator electrode fingers (30) are arranged at functional side of substrate and the actuator electrode fingers (28) are arranged at outer side of movable mass such that a stator electrode finger or actuator electrode finger partially overlaps the trench. Independent claims are included for the following: (1) a manufacturing method of micromechanical component; and (2) a manufacturing method of sensor device.