Micromechanical component with temperature stabilization and method for setting a defined temperature or a defined temperature characteristic of a micromechanical component

摘要

A micromechanical component comprises a micromechanical functional structure and a of the micromechanical functional structure associated electromagnetic radiation heating, and which is constructed to a temporally and spatially defined temperature or a temporally and spatially defined temperature profile in the micromechanical functional structure to effect.