Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device

摘要

A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.