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Three-dimensional of electromagnetic radiation detector and its method for producing
Three-dimensional of electromagnetic radiation detector and its method for producing
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机译:三维电磁辐射探测器及其制造方法
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摘要
A device for detecting electromagnetic radiation including at least one detection circuit including a non-cooled thermal detector and an associated reading circuit, and a method for producing the device. The device includes a substrate forming a cavity under vacuum, in which are placed the thermal detector and the reading circuit. A window transparent to radiation is placed above the cavity and ensures the sealing of the cavity. A sealing mechanism hermetically attaches the window on the substrate, and an electrical connection is inserted in the window ensuring a leaktight connection between the detection circuit and processing elements outside the cavity.
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