METHOD OF INSPECTING AN ELECTROMAGNETIC RADIATION SENSING PANEL, AN ELECTROMAGNETIC RADIATION SENSING PANEL INSPECTION DEVICE AND METHOD OF MANUFACTURING AN ELECTROMAGNETIC RADIATION DETECTOR

摘要

In an aspect, a method and device of inspecting an electromagnetic radiation sensing panel and a method of manufacturing an electromagnetic radiation detector are provided. The method includes generating converted electromagnetic radiation by irradiating incident electromagnetic radiation onto an electromagnetic radiation conversion layer, measuring the generated converted electromagnetic radiation and evaluating data regarding the converted electromagnetic radiation, generating converted electromagnetic radiation based on the data regarding the converted electromagnetic radiation, and irradiating the generated converted electromagnetic radiation onto an electromagnetic radiation sensing panel.