etikettenblatt cleaning processes for the manufacture of a etikettenblatts, fu00f6rderelement with reinigungsfunktion and process for cleaning a substratbearbeitungssstation

摘要

A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.