HIGH-RESOLUTION X-RAY MICROSCOPIC APPARATUS WITH FLUORESCENT X-RAY ANALYSIS FUNCTION

摘要

PPROBLEM TO BE SOLVED: To provide high-resolution X-ray microscopic apparatus with fluorescent X-ray analysis function where the distance from a target generating X rays to a specimen and that from the specimen to a detecting element of a fluorescent X-ray detector are minimized and the extraction angle of fluorescent X rays is maximized in order to heighten the efficiency in detecting fluorescent X rays. PSOLUTION: In the high-resolution X-ray microscopic apparatus with the fluorescent X-ray analysis function which includes a detector for detecting the fluorescent X rays generated from the specimen by allowing an objective lens to focus an electron beam on the target for generating X rays to irradiate the specimen with the X rays generated from the target and an analysis section for analyzing fluorescent X rays from the detection results of the detector, the whole or part of the detector is built in a magnetic circuit of the objective lens. PCOPYRIGHT: (C)2010,JPO&INPIT