GROOVING METHOD, CONTROL PROGRAM, COMPUTATION PROGRAM, CONTROL SYSTEM, AND PLASMA PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a grooving method, a control program, a computation program, a control system and a plasma processing apparatus which can easily form a grooved part having a stable shape and surface without needing the work of apposing remaining materials on a part to be a product, in the case of forming the grooved part by plasma arc.;SOLUTION: The invented plasma processing apparatus 1 is equipped with a torch 2, a processing position holding mechanism 10, a tilting mechanism and a torch moving mechanism, and is controlled by the control system 20. In the case of forming the grooved part, the second or subsequent plasma process is performed so that the processed acral part of the working space by the preceding plasma process is formed within the area of the working space by the present plasma process, and the working space by the last plasma process reaches the other surface of a workpiece.;COPYRIGHT: (C)2010,JPO&INPIT