POLARIZED INFRARED DETECTOR AND ITS MANUFACTURING METHOD, AND POLARIZED INFRARED DETECTOR ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a polarized infrared detector for enhancing detection sensitivity.;SOLUTION: The polarized infrared detector includes a light receiving part 1 separated from a panel 8, and a supporting beam 2 in a meandering shape for arranging the receiving part 1 above the panel 8. The supporting beam 2 in the meandering shape is formed by connecting in series, with connecting beams 2b, a plurality of longitudinal beams 2a arranged at intervals not wider than λ/2 using the wavelength λ of light incident on the receiving part 1 as a reference, and the receiving part 1 is connected to the lower end of a strut 5 formed projecting downwards from the supporting beam 2, and is arranged below the supporting beam 2, to make the aperture ratio of the light receiving part and the length of the supporting beam independently-designable respectively.;COPYRIGHT: (C)2009,JPO&INPIT