HYDROPHOBIC TREATMENT METHOD, HYDROPHOBIC TREATMENT DEVICE, COATING, DEVELOPMENT APPARATUS, AND STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment apparatus speedily increasing and decreasing the temperature of a hot plate when heat-treating a substrate placed on the hot plate.;SOLUTION: The heat treatment apparatus includes: the hot plate for placing a substrate for heating; a hot plate temperature-controlling section for controlling the temperature of the hot plate according to the temperature of a temperature-controlled medium; and a control section. The control section controls the operations of a medium temperature-controlling means and a supply means to supply the temperature-controlled medium controlled to a temperature higher than a first temperature to the channel of the hot plate temperature-controlled section for changing the temperature of the hot plate to the first temperature higher than an arbitrary temperature from the arbitrary temperature, and to supply the temperature-controlled medium controlled to a temperature lower than a second temperature to the channel of the hot plate temperature-controlling section for changing the temperature of the hot plate to the second temperature lower than an arbitrary temperature from the arbitrary temperature, thus speedily increasing and decreasing the temperature of the hot plate.;COPYRIGHT: (C)2009,JPO&INPIT