STEP MEASURING METHOD AND DEVICE USING STYLUS TYPE STEP PROFILER FOR SURFACE SHAPE MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To provide a measuring method and a device capable of reconciling excellency of responsiveness with smallness of a noise on a step part in a surface shape, when measuring the surface shape by using a stylus type step profiler.;SOLUTION: This step measuring device has: a detection circuit 21 equipped with a low-pass filter having a cut-off frequency of 70 Hz, for outputting data having excellent responsiveness comprising a distance in the abscissa x-direction and displacement in the ordinate z-direction based on a measured voltage acquired by a displacement sensor when sweeping a probe at constant speed in the scheduled x-direction relative to a sample; and a computer device 22 for dividing step data into a rising domain data part, a flat part domain data part, and a falling domain data part based on a value of dz/dx or dz/dt, processing further the flat part domain data part by a soft low-pass filter having the frequency of about 13 Hz, and combining the processed flat part domain data part with the rising domain data part and the falling domain data part, to thereby acquired step shape data.;COPYRIGHT: (C)2009,JPO&INPIT