MEASUREMENT ACCURACY IMPROVEMENT METHOD IN STYLUS TYPE STEP PROFILER FOR SURFACE SHAPE MEASUREMENT AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a measurement accuracy improvement method in a stylus type step profiler excellent in followability to a surface shape which allows acquisition of a shape of a step potion closer to an actual shape while having small displacement noise and a device.;SOLUTION: By using a digital filter executed in calculation processing as a low pass filter whose cutoff frequency is some 15 Hz so as to reduce displacement noise, a measurement result is filtered. A Blackman window is used as a window function in filtering.;COPYRIGHT: (C)2013,JPO&INPIT