REACTION APPARATUS, POWER GENERATOR, AND METHOD FOR PRODUCING REACTION APPARATUS

摘要

PPROBLEM TO BE SOLVED: To prevent a sealing material from being damaged by the heat generated during producing of the reaction apparatus. PSOLUTION: The method comprises closing one opening of a frame 24 which encloses a body part 25 of a reaction apparatus with an upper lid member 21, bonding the upper lid member 21 to the frame 24, then sealing holes 21a-21f which penetrate the upper lid member 21 with a sealing material 67a-67f in a state where lead wires 61-66 are inserted through the holes 21a-21f, connecting the lead wires 61-64 to pads 68g-68j by wires 71-74, bonding the lead wires 65, 66 to a getter material 77, closing the other opening of the frame 24 with a bottom lid member 22, enclosing the body part 25 of the reaction apparatus, getter material 77 and pads 68g-68j within the frame 24, the upper lid member 21 and the bottom lid member 22, and bonding the bottom lid member 22 to the frame 24. PCOPYRIGHT: (C)2009,JPO&INPIT