MIXTURE OF ORGANIC RUTHENIUM COMPLEXES, AND METHOD FOR PRODUCING THIN FILM COMPRISING METALLIC RUTHENIUM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a mixture of organic ruthenium complexes for use in producing a thin film that includes metallic ruthenium and is not contaminated with ruthenium oxide, by a chemical vapor deposition method, and a method for producing a thin film comprising metallic ruthenium using the same.;SOLUTION: The organic ruthenium complexes each comprising a β-diketonate and an unsaturated hydrocarbon compound having at least two double bonds as ligands are represented by formula (1). The mixture of the organic ruthenium complexes is comprised of two or more species of the organic ruthenium complexes represented by formula (1) each having mutually different L. In the formula, X and Y each represents a straight chain or branched 1-6C alkyl group, Z represents a hydrogen atom or a 1-4C alkyl group and L represents an unsaturated hydrocarbon compound having at least two double bonds.;COPYRIGHT: (C)2009,JPO&INPIT