首页> 外国专利> Cr-Mn-B-BASED SPUTTERING TARGET MATERIAL FOR PRODUCING SUBSTRATE FILM IN MAGNETIC RECORDING MEDIUM, AND THIN FILM PRODUCED USING THE SAME

Cr-Mn-B-BASED SPUTTERING TARGET MATERIAL FOR PRODUCING SUBSTRATE FILM IN MAGNETIC RECORDING MEDIUM, AND THIN FILM PRODUCED USING THE SAME

机译:基于Cr-Mn-B的溅射靶材用于在磁性记录介质中制备基膜,并使用相同的方法制备薄膜

摘要

PROBLEM TO BE SOLVED: To provide a Cr-Mn-Ba-based sputtering target material used as a substrate film in a magnetic recording medium, and to provide a thin film produced by using the same.;SOLUTION: Disclosed are a Cr-Mn-B-based sputtering target material for producing a substrate film in a magnetic recording medium comprising, by at%, 5 to 35% Mn and 0.1 to 10% B, and the balance Cr with inevitable impurities, and a method for producing the same. Also disclosed is a Cr-Mn-B-based thin film produced using the above sputtering target material.;COPYRIGHT: (C)2009,JPO&INPIT
机译:解决的问题:提供一种Cr-Mn-Ba基溅射靶材料,用作磁记录介质中的基底膜,并提供使用该靶制备的薄膜。解决方案:本发明公开了一种Cr-Mn。 -B基溅射靶材料,其用于在磁记录介质中制备基底膜,其包含原子百分比为5%至35%的Mn和0.1%至10%以及余量的Cr以及不可避免的杂质,及其制造方法。还公开了一种使用上述溅射靶材制备的Cr-Mn-B基薄膜。版权所有:(C)2009,日本特许厅&INPIT

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号