METHOD FOR MANUFACTURING PALLADIUM-BASED HYDROGEN PERMEABLE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a Pd-based hydrogen permeable film, which has extremely thin thickness and excellent performance of permeating hydrogen and is not curled when exfoliated from a substrate, by a sputtering method.;SOLUTION: A thin film, which consists of Pd or a Pd alloy and has 0.1-5 μm thickness, is deposited on the substrate having 8.0-15.0×10^-6/°C thermal expansion coefficient by the sputtering method. The deposited thin film is detached from the substrate to obtain the hydrogen permeable film. Alternatively, a metal underlying layer is deposited beforehand between the thin film consisting of Pd or the Pd alloy and the substrate and the deposited metal underlying layer is dissolved/removed by an acid to exfoliate the hydrogen permeable film from the substrate.;COPYRIGHT: (C)2009,JPO&INPIT