METHOD FOR MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL DEVICE COMPRISING OSCILLATOR DEVICE MANUFACTURED BY THIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an oscillator device, capable of improving the yield by adjusting two resonance frequencies to an easily adjustable range by an adjustment step by either mass removal or mass addition.;SOLUTION: The method for manufacturing an oscillator device including two oscillators to be driven at first and second resonance frequencies comprises a first step of processing the two oscillators so that when the two oscillators are processed as oscillators having first and second resonance frequencies different from the two drive resonance frequencies in a fixed dispersion range in processing of the two oscillators, the first and second resonance frequencies differed from the two drive resonance frequencies are first and second resonance frequencies f1 and f2 falling respectively within an adjustable resonance frequency range; and a second step of adjusting the f1 and f2 so as to be matched with the gf1 and gf2, respectively.;COPYRIGHT: (C)2009,JPO&INPIT