PROBLEM TO BE SOLVED: To position a coating film thickness sensor to each point of measurement in the same locational relation from a center regardless of the dimensional accuracy and arrangement of a test piece at measurement on the film thickness of a coating pattern formed in the test piece.;SOLUTION: The test piece (3) in which the coating pattern (P) is formed is placed on a stage (4). On the basis of image data captured by an imaging device (6), points of measurement (Mn) are set at regular intervals in a two-dimensional coordinate system (x-y) for measurement with the center of the coating pattern (P) formed in the test piece as an origin. By computing the location of each points of measurement (Mn) in a base coordinate system (X-Y) and positioning the film thickness sensor (5) at each point of measurement (Mn), it is possible to measure film thickness data on each point of measurement (Mn).;COPYRIGHT: (C)2005,JPO&NCIPI
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机译：解决的问题：将涂膜厚度传感器从中心以相同的位置关系放置到每个测量点，而与测试中形成的涂层图案的膜厚有关的尺寸精度和测试件的布置如何解决方案：将形成有涂层图案（P）的测试件（3）放在平台（4）上。基于由成像装置（6）捕获的图像数据，在二维坐标系（xy）中以规则的间隔以规则的间隔设置测量点（M n ），以以在试件上形成的涂层图案（P）为起点。通过计算基本坐标系（XY）中每个测量点（M n ）的位置，并将膜厚传感器（5）定位在每个测量点（M n ），可以在每个测量点（M n ）上测量膜厚数据。;版权：（C）2005，JPO＆NCIPI
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