PROBLEM TO BE SOLVED: To make measurable the eccentricity of a plane to be measured after the easy and reliable specification of an image of the plane to be measured from among images on a light receiving elements.;SOLUTION: This eccentricity measuring apparatus 100 is provided with both a light source for emitting luminous flux having a coherence length shorter than a prescribed optical distance and a polarization beam splitter 4 for dividing the luminous flux into first luminous flux toward the first plane to be measured 51 and second luminous flux toward a plane mirror 11. The eccentricity measuring apparatus 100 is provided with: a measuring optical system 6 for irradiating the first plane to be measured 51 with the first luminous flux; a moving stage 12 for adjusting at least either the optical path length of the first luminous flux or that of the second optical path length reflected at the first plane to be measured 51; a light receiving element 20 for receiving the first luminous flux and the second luminous flux reflected at the first plane to be measured 51; and an eccentricity computing part 22 for determining the eccentricity of the first plane to be measured 51 by computations.;COPYRIGHT: (C)2005,JPO&NCIPI
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