Laser processing equipment and laser processing method using the ultra-short pulse laser

摘要

It has with the optical system control control equipment which measures the laser control control equipment and the optical system and the optical system which control the laser creation device and the laser creation device which output ultrashort pulsed laser light and the measuring device which measures ultrashort pulsed laser light. Strength of the largest noise component pulse in ultrashort pulsed laser light, is designated as 2.5% or less of strength of main pulse.