LASER PROCESSING METHOD AND LASER PROCESSING APPARATUS USING ULTRA-SHORT PULSE LASER

摘要

A laser processing apparatus (101) includes a laser generation apparatus (105) for outputting an ultra-short pulse laser beam (107), a laser control apparatus for controlling the laser generation apparatus (107), an optical system (106), an optical system control apparatus for measuring the optical system (106), and a measurement apparatus (109) for measuring the ultra-short pulse laser beam (107). The intensity of the largest noise component pulse in the ultra-short pulse laser beam is controlled to be 2.5% or less of the intensity of the primary pulse in the ultra-short pulse laser beam (107).