Pattern generator, pattern generation method and test equipment

摘要

PROBLEM TO BE SOLVED: To restrain capacity necessary for a pattern memory storing inspection patterns. SOLUTION: This pattern generator consists of a pattern memory 32 storing inspection patterns, memory banks 40-43 storing inspection patterns read from the pattern memory 32, a vector memory 12 storing a vector command, an address expanding part 22 which detects whether an address on the pattern memory 32 of an inspection pattern to be generated jumps, on the basis of the vector command which is read from the vector memory 12, a jump transfer controlling part 31 which detects an address to which jump is further performed in the case that necessity of jump is detected, a transfer controlling part 34 which reads inspection patterns after the address detected with the jump transfer controlling part 31 from the pattern memory 32 and transfers the inspection patterns to the memory banks 40-43, and a transfer controlling part 34 which generates the inspection patterns by leading out the inspection patterns from the memory banks 40-43 on the basis of the vector command.