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Pattern drawing apparatus, pattern drawing method, information recording medium manufacturing master manufacturing method, and information recording medium manufacturing method
Pattern drawing apparatus, pattern drawing method, information recording medium manufacturing master manufacturing method, and information recording medium manufacturing method
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机译:图案描绘装置,图案描绘方法,信息记录介质制造母盘制造方法以及信息记录介质制造方法
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摘要
A pattern drawing apparatus which is capable of reducing manufacturing costs of information recording media. A partial drawing process is executed in response to output of a reference signal, for drawing, after being on standby for a predetermined standby time period, pattern segments, which are obtained by dividing patterns forming a servo pattern in the direction of the width of the patterns, by irradiation of a resin layer with an electron beam. A drawing position-changing process is executed for changing the irradiation position of the electron beam on the resin, toward a center of rotation of a substrate or away from the center of rotation, within a range of the effective drawing width of the electron beam. These processes are executed a plurality of times to draw an exposure pattern on the resin layer.
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