Pattern drawing apparatus, method pattern drawing, information method of manufacturing recording medium manufacturing master, and a manufacturing method of the information recording medium

摘要

PROBLEM TO BE SOLVED: To reduce the cost of manufacturing an information recording medium by carrying out partial drawing processing, and drawing position changing processing in which a drawing position is changed alternately a plurality of times, and drawing an exposure pattern onto a resin layer.;SOLUTION: A pattern drawing device is composed so that an exposure pattern P can be drawn for forming a concave-convex pattern for manufacturing an information recording medium. A beam output is composed so that an electronic beam EB can be outputted of which effective drawing width is smaller than the width and the length of each pattern PSO. A control unit performs processing of drawing the pattern PSO by controlling the beam output to make it output the electronic beam EB, and controlling a beam deflector to make the electronic beam EB reciprocate in the widthwise direction of the pattern PSO to be drawn after waiting for a predetermined time t1w, when a standard signal S1 generated by a standard signal generator, based on either an internal signal generated inside a rotational mechanism that rotates the substrate or a rotation driving signal to the rotational mechanism so as to synchronize with the rotation of a substrate is outputted, and draws the exposure pattern P.;COPYRIGHT: (C)2006,JPO&NCIPI