Production method of carbon nano- tube aggregate, carbon nano- tube aggregate, catalyst particle dispersed membrane, electron emission element, and field emission type display

摘要

Being production method of the carbon nano- tube aggregate which controls the growth density of the carbon nano- tube on the baseplate, it includes with the thermal CVD process which grows the carbon nano- tube process and the aforementioned metal catalyst particle which prepare the catalyst particle dispersed membrane formation baseplate which has the catalyst particle dispersed membrane where the metal catalyst particle which possesses specified grain size is dispersed in the obstacle particle as a base point, with the thermal decomposition of the organic compound steam, production method of the carbon nano- tube aggregate.