Imaging device, defect inspection equipment, defect inspection method and electron beam inspection system

摘要

PROBLEM TO BE SOLVED: To improve contrast of a picked-up image by uniformalizing a potential distribution on a surface of an inspection object.;SOLUTION: The imaging device irradiates an electron beam emitted from an electron gun on an object, detects electrons emitted from the object by using a detector, and carries out collection of image information of the object and inspection of a defect or the like of the object. The device has a means to uniformalize or reduce electric charge taken on the object.;COPYRIGHT: (C)2007,JPO&INPIT