The computer and the x-ray analysis section and this x-ray analysis section which control the electron microscope

摘要

PROBLEM TO BE SOLVED: To preserve, automatically as image data, an analytical position of a sample where spectrum data measured by an X-ray analytical device are measured. SOLUTION: This device 1 comprises an electron microscope 4 for outputting an electron microscope image of an analytical object sample S, an X-ray analysis part 6, and computers 5, 7 for controlling these instruments, and is so composed that the electron microscope image obtained by the electron microscope 4 and an X-ray spectrum obtained by the X-ray analysis part 6 can be taken in the computers 5, 7. In this case, image data Db for showing the electron microscope image and spectrum data Ds of an X-ray generated from a prescribed analytical position on the electron microscope image can be preserved by one-time operation in one recording medium (for example, a removable disc such as MO) installed in the computer 7, where the computers 5, 7 can read or write.