ELECTRON BEAM IRRADIATION APPARATUS, SCANNING ELECTRON MICROSCOPE APPARATUS, AND X-RAY ANALYSIS APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an electron beam irradiation apparatus and a scanning electron microscope apparatus, which have a high resolution and are small.;SOLUTION: The electron beam irradiation apparatus comprises an electron beam source, an accelerating electrode for accelerating electrons emitted from this electron beam source, and an electron lens for converging an accelerated electron beam, and further comprises an integrated electron beam irradiation part without a deflection means for electrically changing the direction of radiation of the electron beam, and comprises a mechanically moving means for moving the relative position between the electron beam irradiation part and a sample.;COPYRIGHT: (C)2003,JPO