The silica powder which is generated with the flame reaction (the glass particulate) making the diaphragm die pump for silica

摘要

PROBLEM TO BE SOLVED: To provide a diaphragm pump and a method of manufacturing a matrix for optical fiber in which installation trouble caused by the deterioration of a diaphragm due to lubricant oil can be solved and non-adhesion silica collected in an exhaust gas processing installation can be successively taken out and transferred. ;SOLUTION: In this pump attached to an exhaust gas processing installation for separating and removing silica powder discharged to the outside of a system together with exhaust gas without being deposited on a starting core matrix when silica powder (glass fine particles) produced by flame reaction is deposited on the surface of the starting core matrix and a matrix for optical fiber is synthesized, an oil resisting film is formed on at least the surface of the driving air supply side of a diaphragm.;COPYRIGHT: (C)2001,JPO